Research at the Microsystem Technology Lab Old webpage with outdated information: Please follow this link and update your bookmarks

The Microsystem Technology lab (MST) is a part of the department of Signals, Sensors and Systems (S3). Our research is mainly centered around Microelectromechanical Systems (MEMS) and its applications, with a focus on silicon-based applied sensor and actuator technology. Our research staff has developed a significant number of devices with promising performance. The group fabricates its silicon structures and devices at the KTH microelectronics laboratory, comprising 1200m2 of cleanroom area with all the facilities of small-scale microelectronics and for research on and development of special purpose structures and components in silicon. The group works on applications in the medical field (MedMEMS), the biotechnology field (BioMEMS), optical components (OptoMEMS) and radio frequency signal components (RFMEMS). Furthermore, MST is participating in the European projects Q2M, SABIO and Nordite.

Current Research Projects
	Bead-based microfluidic platform for biochemical applications We are developing a microfluidic flow-through system for miniaturized DNA pyrosequencing. Pyrosequencing is a technique based on the detection of released pyrophosphate during DNA synthesis.
	Microfluidic interfaces This research focusses on developing interfaces for the transfer of sample in the form of liquid, gas or aerosol to an on-chip liquid enviroment for chemical analysis.
	Microfluidic component design We focus our research on liquid control in microfluidic systems by engineering the flow channel geometry and by tailoring the microchannel surface properties. Valves, mixers, liquid metering structures, etc, are designed, tested and evaluated.
	Transdermal drug delivery Our research focusses on the development of transdermal drug delivery systems utilising one-shot microfluidic actuators in conjunction with hollow microneedles.
	Micropneumatic gas control devices We design, fabricate and evaluate low-footprint microvalves for large gas flow control. The research includes optimisation of flow nozzle and valve actuator design.
	RF MEMS switches and switching circuits Since 2001, the MST group is working in the field of RF MEMS. The first device was an RF switch based on a special actuator providing both low actuation voltage and high isolation. Since then, a switch array with 800 switches integrated on a single chip has been developed for a specific telecommunication application, and mechanically multi-stable switch concepts have been investigated for low frequency and for microwave applications.
	RF MEMS for automotive radar front-end The MST group is participant and project coordinator in a Scandinavian project on RF MEMS front-end for 77-79 GHz automotive radar. The NORDITE project comprises three academic partners and ten industrial supporters. direct link to the project's webpages.
	Wafer-level packaging of MEMS devices by full-wafer adhesive bonding The MST group developed a technique which allows the parallel packaging of all devices by one full-wafer bonding step. The separation of the capping lids is done afterwards by dicing, together with or separate from the substrate wafer.
	Micro fuel cells
Other Research Projects
	Thermal polymer V-shaped actuators In-plane and out-of-plane polyimide thermal V-groove microactuators have been developed at our department with an eye towards applications in the optics, automation and robotics industry.
	Gas flow measurements We developed micromachined hotwire sensors, held up from the surface, using hybrid assembly in multi-chip sensor modules.
Ultra miniaturized blood pressure sensor Fibre Optic Refractive Index Sensor Fibre Optic Strain Sensors Sensors for Anaesthesia and Respirator Equipment Fluid Density and Coriolis mass flow sensor IR Gas Analysis System for CO2 Measurement Micro-motion systems Polyimide Joint Actuators Mass spectroscopy spraying tips Transdermal biopotential electrodes Valve-less fluid micro-pump Thermal infrared-detector array Micromirror arrays Microbeads based processes Turbulent gas flow measurement
More Research
A background to MEMS Dissertations Publications Highlights	Photo and Video Gallery Links to other MEMS sites Current Thesis Project Proposals